VelvEtch™ EEMP™ systems provide semiconductor device manufactures with unique capabilities, including etching, polishing & cleaning to …
- atomically smooth surfaces and interfaces
- damage free surfaces, interfaces and lattices structures
- stoichiometry preserving surfaces and lattice structures
- high selectivity, material specific electron energy thresholds
- polymer free surfaces and sidewalls, no cleaning required
- high etch rates, comparable to reactive ion etch rates
- processing at room temperature, no cooling required
VelvEtch™ EEMP™ technology can be utilized to etch, pattern, smooth, polish, prep, clean and modify surfaces of wide range of materials …